Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics - Concepedia

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Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics

18

Citations

1

References

2007

Year

Nicole Ahner, Stefan E. Schulz, F. Blaschta, M. Rennau

Microelectronic Engineering

MagnetismSpintronicsEngineeringPhysicsSpin PhenomenonApplied PhysicsMagnetic ResonanceSemiconductor MaterialSpintronic MaterialMicroelectronicsThermal StabilityElectrical Insulation

References

	Year	Citations

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