Takeshi Momose

Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH<i>x</i> radical formation

Hideharu Shimizu, Kaoru Sakoda, Takeshi Momose et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 52 citations

Materials Science, Precursor Feed Period, Chemical Engineering +12

Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

Takeshi Momose, Masakazu Sugiyama, Eiichi Kondoh et al. · Applied Physics Express · 2008 · 52 citations

Materials Science, Angled Polishing, Engineering +14

Precursor Evaluation for Cu-Supercritical Fluid Deposition Based on Adhesion Properties and Surface Morphology

Takeshi Momose, Masakazu Sugiyama, Yukihiro Shimogaki · Japanese Journal of Applied Physics · 2005 · 32 citations

Engineering, Supercritical Fluid Chromatography, Chemistry +19

Atomic Layer Deposited Co(W) Film as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects

Hideharu Shimizu, Kaoru Sakoda, Takeshi Momose et al. · Japanese Journal of Applied Physics · 2012 · 28 citations

Engineering, Oxidation Resistance, Chemistry +17

Multi-Scale Analysis and Elementary Reaction Simulation of SiC-CVD Using CH₃SiCl₃/H₂

Yasuyuki Fukushima, Noboru Satô, Yuichi Funato et al. · ECS Journal of Solid State Science and Technology · 2013 · 25 citations · Full text

Materials Science, Chemical Engineering, Engineering +11