Concepedia

Kaoru Sakoda

KS

Statistics

Publications

5

Citations

162

H-Index

5

Active since

2008

Affiliations

The University of Tokyo(Current)

NTN (Japan)

Kaoru Sakoda is an author at The University of Tokyo specializing in engineering, surface science, and chemical engineering.

Top concepts

Publications per year

2008–2012

5

Publications

5

Hot-wire-assisted atomic layer deposition of a high quality cobalt film using cobaltocene: Elementary reaction analysis on NH<i>x</i> radical formation

Hideharu Shimizu, Kaoru Sakoda, Takeshi Momose et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2011 · 52 citations

, , +12

CVD of cobalt–tungsten alloy film as a novel copper diffusion barrier

Hideharu Shimizu, Kaoru Sakoda, Yukihiro Shimogaki · Microelectronic Engineering · 2012 · 47 citations

, , +7

Atomic Layer Deposited Co(W) Film as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects

Hideharu Shimizu, Kaoru Sakoda, Takeshi Momose et al. · Japanese Journal of Applied Physics · 2012 · 28 citations

, , +17

Atomic Layer Deposited Co(W) Film as a Single-Layered Barrier/Liner for Next-Generation Cu-Interconnects

H. Shimizu, Kaoru Sakoda, Takeshi Momose et al. · Japanese Journal of Applied Physics · 2012 · 25 citations

High-Efficiency PFC Abatement System Utilizing Plasma Decomposition and Ca(OH)$_{2}$/CaO Immobilization

Katsumasa Suzuki, Yoshio Ishihara, Kaoru Sakoda et al. · IEEE Transactions on Semiconductor Manufacturing · 2008 · 10 citations

, , +5

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