Concepedia

Yuichi Funato

YF

Statistics

Publications

6

Citations

84

H-Index

6

Active since

2013

Affiliations

The University of Tokyo(Current)

IHI Corporation (Japan)

Japan Science and Technology Agency

Yuichi Funato is an author at The University of Tokyo specializing in chemical engineering, applied physics, and engineering.

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Publications per year

2013–2021

6

Publications

6

Multi-Scale Analysis and Elementary Reaction Simulation of SiC-CVD Using CH<sub>3</sub>SiCl<sub>3</sub>/H<sub>2</sub>

Yasuyuki Fukushima, Noboru Satô, Yuichi Funato et al. · ECS Journal of Solid State Science and Technology · 2013 · 25 citations · Full text

, , +11

Fundamental Evaluation of Gas-Phase Elementary Reaction Models for Silicon Carbide Chemical Vapor Deposition

Yuichi Funato, Noboru Satô, Yasuyuki Fukushima et al. · ECS Journal of Solid State Science and Technology · 2017 · 15 citations

, , +14

Conformal and Stoichiometric Chemical Vapor Deposition of Silicon Carbide onto Ultradeep Heterogeneous Micropores by Controlling the Initial Nucleation Stage

Kohei Shima, Yuhei Otaka, Noboru Satô et al. · ACS Applied Materials & Interfaces · 2021 · 13 citations

Modeling of the elementary gas‐phase reaction during chemical vapor deposition of silicon carbide from CH<sub>3</sub>SiCl<sub>3</sub>/H<sub>2</sub>

Noboru Satô, Yuichi Funato, Yasuyuki Fukushima et al. · International Journal of Chemical Kinetics · 2020 · 11 citations

, , +17

Separate evaluation of multiple film-forming species in chemical vapor deposition of SiC using high aspect-ratio microchannels

Kohei Shima, Noboru Satô, Yuichi Funato et al. · Japanese Journal of Applied Physics · 2017 · 10 citations

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