Statistics
Publications
6
Citations
179
H-Index
6
Active since
2001
Affiliations
T. Owada is an author at Toshiba (Japan) specializing in materials science, flash lamp annealing, and semiconductor devices.
Publications per year
2001–2010
6
6
K. Yamakawa, Keitaro Imai, O. Arisumi et al. · Japanese Journal of Applied Physics · 2002 · 31 citations
Natural Sciences, Materials Engineering, Materials Science +17
Flash lamp annealing technology for ultra-shallow junction formation
Takayuki Ito, K. Suguro, M. Tamura et al. · 2002 · 17 citations
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