Concepedia
Statistics
Publications
43
Citations
1K
H-Index
19
Active since
1983
Affiliations
Fujitsu (Japan)(Current)
University of Tsukuba
Waseda University
Hiroshima University
Takayuki Aoyama is an author at Fujitsu (Japan) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMicroelectronicsMaterial ScienceNanoelectronicsSurface ScienceChemistryPhysicsCrystalline Defects
Publications per year
1983–2017
Effect of fluorine on boron diffusion in thin silicon dioxides and oxynitride
Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of Applied Physics · 1995 · 72 citations
Engineering, Thin Silicon Dioxides, Chemistry +16
Silicon (001) surface after annealing in hydrogen ambient
Takayuki Aoyama, Kenichi Gotō, Tatsuya Yamazaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 70 citations
H2 Ambient, Engineering, Chemistry +18
Effective-Work-Function Control by Varying the TiN Thickness in Poly-Si/TiN Gate Electrodes for Scaled High- $k$ CMOSFETs
Masaru Kadoshima, Takeo Matsuki, Seiichi Miyazaki et al. · IEEE Electron Device Letters · 2009 · 63 citations
Low-power Electronics, Materials Science, Electrical Engineering +11
Boron Diffusion Through Pure Silicon Oxide and Oxynitride Used for Metal‐Oxide‐Semiconductor Devices
Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of The Electrochemical Society · 1993 · 57 citations
Semiconductors, Materials Science, Electrical Engineering +12
Silicon-Hydrogen Bonds in Silicon Native Oxides Formed during Wet Chemical Treatments
Kazuhisa Sugiyama, Takayuki Igarashi, Kazunori Moriki et al. · Japanese Journal of Applied Physics · 1990 · 52 citations
Materials Engineering, Materials Science, Chemical Engineering +15
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