Concepedia

Takayuki Aoyama

TA

Statistics

Publications

43

Citations

1K

H-Index

19

Active since

1983

Affiliations

Fujitsu (Japan)(Current)

University of Tsukuba

Waseda University

Hiroshima University

Takayuki Aoyama is an author at Fujitsu (Japan) specializing in materials science, semiconductor materials, and materials engineering.

Publications per year

1983–2017

43

Publications

43

Effect of fluorine on boron diffusion in thin silicon dioxides and oxynitride

Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of Applied Physics · 1995 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +17

Silicon (001) surface after annealing in hydrogen ambient

Takayuki Aoyama, Kenichi Gotō, Tatsuya Yamazaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 70 citations

Natural Sciences, Chemistry, Materials Science +17

Effective-Work-Function Control by Varying the TiN Thickness in Poly-Si/TiN Gate Electrodes for Scaled High- $k$ CMOSFETs

Masaru Kadoshima, Takeo Matsuki, Seiichi Miyazaki et al. · IEEE Electron Device Letters · 2009 · 65 citations

Engineering, Electrical Engineering, Materials Science +17

Boron Diffusion Through Pure Silicon Oxide and Oxynitride Used for Metal‐Oxide‐Semiconductor Devices

Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of The Electrochemical Society · 1993 · 57 citations

Engineering, Materials Engineering, Materials Science +17

Silicon-Hydrogen Bonds in Silicon Native Oxides Formed during Wet Chemical Treatments

Kazuhisa Sugiyama, Takayuki Igarashi, Kazunori Moriki et al. · Japanese Journal of Applied Physics · 1990 · 52 citations

Natural Sciences, Chemistry, Materials Science +15

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