Takayuki Aoyama

Effect of fluorine on boron diffusion in thin silicon dioxides and oxynitride

Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of Applied Physics · 1995 · 72 citations

Engineering, Thin Silicon Dioxides, Chemistry +16

Silicon (001) surface after annealing in hydrogen ambient

Takayuki Aoyama, Kenichi Gotō, Tatsuya Yamazaki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 70 citations

H2 Ambient, Engineering, Chemistry +18

Effective-Work-Function Control by Varying the TiN Thickness in Poly-Si/TiN Gate Electrodes for Scaled High- $k$ CMOSFETs

Masaru Kadoshima, Takeo Matsuki, Seiichi Miyazaki et al. · IEEE Electron Device Letters · 2009 · 63 citations

Low-power Electronics, Materials Science, Electrical Engineering +11

Boron Diffusion Through Pure Silicon Oxide and Oxynitride Used for Metal‐Oxide‐Semiconductor Devices

Takayuki Aoyama, Kunihiro Suzuki, Hiroko Tashiro et al. · Journal of The Electrochemical Society · 1993 · 57 citations

Semiconductors, Materials Science, Electrical Engineering +12

Silicon-Hydrogen Bonds in Silicon Native Oxides Formed during Wet Chemical Treatments

Kazuhisa Sugiyama, Takayuki Igarashi, Kazunori Moriki et al. · Japanese Journal of Applied Physics · 1990 · 52 citations

Materials Engineering, Materials Science, Chemical Engineering +15