Concepedia

Pavel Izikson

PI

5

Publications

101

Citations

5

H-Index

2003

Active since

Affiliations

KLA (Israel)(Current)

IMEC

Pavel Izikson is an author at KLA (Israel) specializing in engineering, computer engineering, and systems engineering.

Top concepts

EngineeringComputer EngineeringMetrologySystems EngineeringCalibrationMeasurementControl DesignMicroelectronicsMechanical SystemsControl Engineering

Publications per year

2003–2008

5

Publications

5

Optimized Overlay Metrology Marks: Theory and Experiment

Michael E. Adel, Mark Ghinovker, Boris Golovanevsky et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 32 citations

Geometric Modeling, Sensor Calibration, Overlay Metrology Mark +14

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Overlay Errors, Engineering, Wafer Scale Processing +14

Characterization of overlay mark fidelity

Mike Adel, Mark Ghinovker, J. Poplawski et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 18 citations

Engineering, Industrial Engineering, Mechanical Engineering +19

Differential signal scatterometry overlay metrology: an accuracy investigation

Daniel Kandel, Mike Adel, Berta Dinu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

Radar, Array Processing, Differential Signal Scatterometry +14

Optimization of high order control including overlay, alignment, and sampling

DongSub Choi, Chul Seung Lee, Changjin Bang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 15 citations

Control Method, Electrical Engineering, High Order Control +11

Rows per page

1–5 of 5