Concepedia

Berta Dinu

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1

Publications

17

Citations

1

H-Index

2007

Active since

Affiliations

KLA (Israel)(Current)

Berta Dinu is an author at KLA (Israel) specializing in calibration, computer engineering, and instrumentation.

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Publications per year

2007–2007

1

Publications

1

Differential signal scatterometry overlay metrology: an accuracy investigation

Daniel Kandel, Mike Adel, Berta Dinu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

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