Yoshinori Takao

Optical and Electrical Characterization of Hydrogen-Plasma-Damaged Silicon Surface Structures and Its Impact on In-line Monitoring

Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa et al. · Japanese Journal of Applied Physics · 2010 · 58 citations

Optical Materials, Engineering, Si Surface Damage +18

Plasma chemical behaviour of reactants and reaction products during inductively coupled CF₄plasma etching of SiO₂

Hiroshi Fukumoto, Isao Fujikake, Yoshinori Takao et al. · Plasma Sources Science and Technology · 2009 · 53 citations

Plasma Chemical Behaviour, Engineering, Plasma Physics +17

Model for Bias Frequency Effects on Plasma-Damaged Layer Formation in Si Substrates

Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda et al. · Japanese Journal of Applied Physics · 2010 · 51 citations

Electrical Engineering, Engineering, Bias Frequency Effect +15

Modeling of ion-bombardment damage on Si surfaces for in-line analysis

Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao et al. · Thin Solid Films · 2009 · 51 citations

Electrical Engineering, Ion Implantation, Engineering +11

Three-dimensional particle-in-cell simulation of a miniature plasma source for a microwave discharge ion thruster

Yoshinori Takao, Hiroyuki Koizumi, Kimiya Komurasaki et al. · Plasma Sources Science and Technology · 2014 · 50 citations

Miniature Plasma Source, Electrical Engineering, Engineering +14