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Isao Fujikake

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Publications

1

Citations

53

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1

Active since

2009

Affiliations

Kyoto University(Current)

Isao Fujikake is an author at Kyoto University specializing in chemical engineering, chemical kinetics, and engineering.

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Publications per year

2009–2009

1

Publications

1

Plasma chemical behaviour of reactants and reaction products during inductively coupled CF<sub>4</sub>plasma etching of SiO<sub>2</sub>

Hiroshi Fukumoto, Isao Fujikake, Yoshinori Takao et al. · Plasma Sources Science and Technology · 2009 · 53 citations

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