Scott P. Doran

Supplemental multilevel interconnects by laser direct writing: Application to GaAs digital integrated circuits

Jerry G. Black, Scott P. Doran, M. Rothschild et al. · Applied Physics Letters · 1987 · 39 citations

Engineering, Computer Engineering, Electrical Engineering +17

Polymer photochemistry at advanced optical wavelengths

Theodore H. Fedynyshyn, Roderick R. Kunz, Roger F. Sinta et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 33 citations

Natural Sciences, Chemistry, Materials Science +17

Infrared frequency selective surfaces fabricated using optical lithography and phase-shift masks

S. J. Spector, David K. Astolfi, Scott P. Doran et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +13

Laser-direct-writing processes: Metal deposition, etching, and applications to microcircuits

Jerry G. Black, Daniel J. Ehrlich, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 27 citations

Engineering, Electrical Engineering, Materials Science +17

Low-temperature laser deposition of tungsten by silane- and disilane-assisted reactions

Jerry G. Black, Scott P. Doran, M. Rothschild et al. · Applied Physics Letters · 1990 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +12