Concepedia
Statistics
Publications
3
Citations
107
H-Index
Active since
1999
Affiliations
IMEC(Current)
Conny Kenens is an author at IMEC specializing in wafer cleaning, engineering, and cleanroom processing.
Publications per year
1999–2001
Cost-effective cleaning and high-quality thin gate oxides
Marc Heyns, Twan Bearda, Ingrid Cornelissen et al. · IBM Journal of Research and Development · 1999 · 48 citations
Engineering, Materials Engineering, Materials Science +17
Removal of Submicrometer Particles from Silicon Wafer Surfaces Using HF-Based Cleaning Mixtures
Rita Vos, Marcel Lux, Kai Xu et al. · Journal of The Electrochemical Society · 2001 · 42 citations · Full text
Controlled Deposition of Organic Contamination and Removal with Ozone-Based Cleanings
M. Claes, Stefan De Gendt, Conny Kenens et al. · Journal of The Electrochemical Society · 2001 · 17 citations
Engineering, Chemical Engineering, Chemistry +16
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