Concepedia
Statistics
Publications
4
Citations
65
H-Index
Active since
2001
Affiliations
IMEC(Current)
KU Leuven
M. Claes is an author at IMEC specializing in natural sciences, chemistry, and surface science.
Publications per year
2001–2012
The Increasing Importance of the Use of Ozone in the Microelectronics Industry
Florimond De Smedt, Stefan De Gendt, M. Claes et al. · Ozone Science and Engineering · 2002 · 25 citations
Natural Sciences, Chemical Engineering, Chemistry +15
Controlled Deposition of Organic Contamination and Removal with Ozone-Based Cleanings
M. Claes, Stefan De Gendt, Conny Kenens et al. · Journal of The Electrochemical Society · 2001 · 17 citations
Engineering, Chemical Engineering, Chemistry +16
Selection of ESH solvents for the wet removal of post-etch photoresists in low-k dielectrics integration
E. Kesters, M. Claes, Quoc Toan Le et al. · Microelectronic Engineering · 2008 · 12 citations
Natural Sciences, Chemistry, Materials Science +16
Methodology for Measuring Trace Metal Surface Contamination on Pv Silicon Substrates
Jens Rip, Kurt Wostyn, Paul Mertens et al. · Energy Procedia · 2012 · 11 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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