S. V. Pendharkar

Process development of sub-0.5 μm nonvolatile magnetoresistive random access memory arrays

Kevin J. Nordquist, S. V. Pendharkar, M. Durlam et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 37 citations

Engineering, Materials Engineering, Materials Science +15

Application of optical filters fabricated by masked ion beam lithography

M. D. Morgan, W. E. Horne, V. S. Sundaram et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 33 citations

Engineering, Electrical Engineering, Materials Science +17

A proximity ion beam lithography process for high density nanostructures

J. C. Wolfe, S. V. Pendharkar, Paul Ruchhoeft et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 29 citations

Engineering, Materials Engineering, Materials Science +12

Reactive ion etching of silicon stencil masks in the presence of an axial magnetic field

S. V. Pendharkar, J. C. Wolfe, H. R. Rampersad et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 22 citations

Engineering, Materials Engineering, Materials Science +17

Uniform low stress oxynitride films for application as hardmasks on x-ray masks

William J. Dauksher, Douglas J. Resnick, Steven M. Smith et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +17