Mattia Pasquali

Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition

Mattia Pasquali, Stefan De Gendt, Silvia Armini · Applied Surface Science · 2020 · 19 citations

Materials Science, Engineering, Octadecanethiol-derived Self-assembled Monolayer +7

Understanding Selectivity Loss Mechanisms in Selective Material Deposition by Area Deactivation on 10 nm Cu/SiO₂ Patterns

Mattia Pasquali, Patrick Carolan, Stefanie Sergeant et al. · ACS Applied Electronic Materials · 2022 · 14 citations

CMOS-Compatible Contacts to n-InP

E. Ghegin, Philippe Rodriguez, Mattia Pasquali et al. · IEEE Transactions on Electron Devices · 2017 · 13 citations

Materials Engineering, Materials Science, Cmos-compatible Contacts +15

The role of atomic oxygen in the decomposition of self-assembled monolayers during area-selective atomic layer deposition

A. P. Brady, Robert O’Connor, Silvia Armini et al. · Applied Surface Science · 2022 · 11 citations

Area-Selective Deposition of AlO<i>_x</i> and Al-Silicate for Fully Self-Aligned Via Integration

Mattia Pasquali, A. P. Brady, A. Leśniewska et al. · ACS Applied Materials & Interfaces · 2023 · 11 citations