Diane K. Stewart

Gas-assisted etching with focused ion beam technology

J. Casey, Andrew F. Doyle, Randall G. Lee et al. · Microelectronic Engineering · 1994 · 44 citations

Engineering, Materials Engineering, Materials Science +10

Performance of multicusp plasma ion source for focused ion beam applications

Larry Scipioni, Diane K. Stewart, David C. Ferranti et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 36 citations

Natural Sciences, Physics, Optics +13

Focused ion beam induced deposition of tungsten on vertical sidewalls

Diane K. Stewart, James P. Morgan, Bob Ward · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 36 citations

Engineering, Materials Engineering, Materials Science +13

Focused-Ion-Beam Induced Deposition Of Metal For Microcircuit Modification

Diane K. Stewart, Lewis Stern, John C. Morgan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 32 citations

Engineering, Materials Engineering, Materials Science +15

Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair

Diane K. Stewart, Andrew F. Doyle, J. Casey · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17