Microelectronic Engineering · 1994 · 44 citations · 2 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSurface EngineeringSurface ScienceEtching ProcessesIon ImplantationPlasma Surface TreatmentThin Film EtchingFocused Ion Beam MachiningIon Beam EtchingPlasma Etching
2
Characteristics of gas-assisted focused ion beam etching
Richard Young, J. R. A. Cleaver, H. Ahmed · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 82 citations
Natural Sciences, Materials Engineering, Materials Science +14