13
Publications
377
Citations
12
H-Index
1987
Active since
J. Casey is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsPlasma PhysicsSurface ScienceMicroelectronicsPlasma ConfinementMaterials EngineeringElectrical Engineering
Publications per year
1987–2018
13
13
Gas-assisted etching with focused ion beam technology
J. Casey, Andrew F. Doyle, Randall G. Lee et al. · Microelectronic Engineering · 1994 · 44 citations
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