Concepedia

Andrew F. Doyle

AF

2

Publications

60

Citations

2

H-Index

1994

Active since

Andrew F. Doyle is an author specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceThin FilmsOptoelectronicsMaterial ScienceMicroelectronicsMicrofabricationMaterials Engineering

Publications per year

1994–1995

2

Publications

2

Gas-assisted etching with focused ion beam technology

J. Casey, Andrew F. Doyle, Randall G. Lee et al. · Microelectronic Engineering · 1994 · 44 citations

Engineering, Beam Lithography, Microfabrication +6

Focused ion beam deposition of new materials: dielectric films for device modification and mask repair, and tantalum films for x-ray mask repair

Diane K. Stewart, Andrew F. Doyle, J. Casey · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 16 citations

Engineering, X-ray Masks, Fib Dielectric Films +16

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