Yusuke Fukuda

Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation

Katsura Otaki, K. Ota, Iwao Nishiyama et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 75 citations

Short Wavelength Optic, Engineering, Electron-beam Lithography +27

Optical emission spectroscopy study toward high rate growth of microcrystalline silicon

Yusuke Fukuda, Yoshikazu Sakuma, Chisato Fukai et al. · Thin Solid Films · 2001 · 48 citations

Materials Science, Photonics, Optical Materials +9

Accuracy evaluation of the point diffraction interferometer for extreme ultraviolet lithography aspheric mirror

Katsura Otaki, Takahiro Yamamoto, Yusuke Fukuda et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 34 citations

Short Wavelength Optic, Engineering, Measurement +22

Cyclopolymerization of 9,9-Diallylfluorene Promoted by Ni Complexes. Stereoselective Formation of Six- and Five-Membered Rings during the Polymer Growth

Daisuke Takeuchi, Yusuke Fukuda, Sehoon Park et al. · Macromolecules · 2009 · 33 citations

Inorganic Chemistry, Engineering, Stereoselective Formation +14

Time-dependent changes in adhesive force between chondrocytes and silk fibroin substrate

Koji Yamamoto, Naohide Tomita, Yusuke Fukuda et al. · Biomaterials · 2007 · 32 citations

Mechanobiology, Time-dependent Changes, Engineering +11