Concepedia

Chisato Fukai

CF

5

Publications

157

Citations

5

H-Index

1999

Active since

Affiliations

Saitama University(Current)

Chisato Fukai is an author at Saitama University specializing in materials science, applied physics, and engineering.

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Publications per year

1999–2001

5

Publications

5

Optical emission spectroscopy study toward high rate growth of microcrystalline silicon

Yusuke Fukuda, Yoshikazu Sakuma, Chisato Fukai et al. · Thin Solid Films · 2001 · 48 citations

, , +9

Fast Deposition of Microcrystalline Silicon Using High-Density SiH<sub>4</sub> Microwave Plasma

Hajime Shirai, Yoshikazu Sakuma, Yoshimizu Moriya et al. · Japanese Journal of Applied Physics · 1999 · 40 citations

, , +9

Enhanced Crystallinity at Initial Growth Stage of Microcrystalline Silicon on Corning #7059 Glass Using SiH<sub>2</sub>Cl<sub>2</sub>

Chisato Fukai, Yoshimizu Moriya, Takuya Nakamura et al. · Japanese Journal of Applied Physics · 1999 · 31 citations

, , +17

Growth kinetics of nanocrystalline silicon from SiH2Cl2 by plasma-enhanced chemical vapor deposition

Hajime Shirai, Chisato Fukai, Yoshikazu Sakuma et al. · Journal of Non-Crystalline Solids · 2000 · 19 citations

, , +10

Low-Temperature Plasma-Enahanced Chemical Vapor Deposition of Crystal Silicon Film from Dichlorosilane

Haiping Liu, Sughoan Jung, Yukihiro Fujimura et al. · Japanese Journal of Applied Physics · 2001 · 19 citations

, , +15

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