M. L. Green

Statistics

Publications

Citations

574

H-Index

Active since

1985

Affiliations

Rutgers, The State University of New Jersey(Current)

AT&T (United States)

Alcatel Lucent (Germany)

Western University

Vanderbilt University

M. L. Green is an author at Rutgers, The State University of New Jersey specializing in materials science, materials engineering, and silicon materials.

Publications per year

1985–2003

Publications

Rapid thermal oxidation of silicon in N2O between 800 and 1200 °C: Incorporated nitrogen and interfacial roughness

M. L. Green, D. Brasen, K. Evans‐Lutterodt et al. · Applied Physics Letters · 1994 · 135 citations

Engineering, Materials Engineering, Materials Science +17

Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

Jane P. Chang, M. L. Green, Vincent M. Donnelly et al. · Journal of Applied Physics · 2000 · 127 citations

Engineering, Materials Engineering, Materials Science +17

High resolution ion scattering study of silicon oxynitridation

Hongcheng Lu, E. P. Gusev, T. Gustafsson et al. · Applied Physics Letters · 1996 · 100 citations

Natural Sciences, Chemistry, Materials Science +13

Structure of Selective Low Pressure Chemically Vapor‐Deposited Films of Tungsten

M. L. Green, R. Lévy · Journal of The Electrochemical Society · 1985 · 71 citations

Natural Sciences, Materials Engineering, Materials Science +17

The Formation and Structure of CVD W Films Produced by the Si Reduction of WF 6

M. L. Green, Y. S. Ali, T. Boone et al. · Journal of The Electrochemical Society · 1987 · 46 citations

Engineering, Materials Engineering, Materials Science +17

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