Concepedia

M. L. Green

ML

9

Publications

572

Citations

9

H-Index

1985

Active since

Affiliations

Rutgers, The State University of New Jersey(Current)

AT&T (United States)

Alcatel Lucent (Germany)

Western University

Vanderbilt University

M. L. Green is an author at Rutgers, The State University of New Jersey specializing in applied physics, engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceChemistrySurface ScienceMaterials EngineeringNanotechnologySemiconductorsMicroelectronicsChemical Engineering

Publications per year

1985–2003

9

Publications

9

Rapid thermal oxidation of silicon in N2O between 800 and 1200 °C: Incorporated nitrogen and interfacial roughness

M. L. Green, D. Brasen, K. Evans‐Lutterodt et al. · Applied Physics Letters · 1994 · 135 citations

Materials Science, Oxide Heterostructures, Chemical Engineering +13

Profiling nitrogen in ultrathin silicon oxynitrides with angle-resolved x-ray photoelectron spectroscopy

Jane P. Chang, M. L. Green, Vincent M. Donnelly et al. · Journal of Applied Physics · 2000 · 125 citations

Materials Science, Semiconductors, Nitrogen Concentration +15

High resolution ion scattering study of silicon oxynitridation

Hongcheng Lu, E. P. Gusev, T. Gustafsson et al. · Applied Physics Letters · 1996 · 100 citations

Ion Implantation, Engineering, Physics +15

Structure of Selective Low Pressure Chemically Vapor‐Deposited Films of Tungsten

M. L. Green, R. Lévy · Journal of The Electrochemical Society · 1985 · 71 citations

Materials Science, Materials Engineering, Chemical Engineering +13

The Formation and Structure of CVD W Films Produced by the Si Reduction of WF 6

M. L. Green, Y. S. Ali, T. Boone et al. · Journal of The Electrochemical Society · 1987 · 46 citations

Materials Science, Materials Engineering, Semiconductors +14

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