Statistics
Publications
11
Citations
179
H-Index
11
Active since
2010
Affiliations
Alexander P. Palov is an author at Lomonosov Moscow State University specializing in materials science, materials engineering, and natural sciences.
Publications per year
2010–2021
11
11
Dependence of dielectric constant of SiOCH low-k films on porosity and pore size
Alexander P. Palov, Mikhail Krishtab, Mikhaı̈l R. Baklanov · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 19 citations
Natural Sciences, Materials Engineering, Materials Science +17
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