Sergey Zyryanov

Actinometry of O, N and F atoms

D. V. Lopaev, A V Volynets, Sergey Zyryanov et al. · Journal of Physics D Applied Physics · 2017 · 95 citations

Natural Sciences, Chemistry, Physics +13

The mechanism of low-k SiOCH film modification by oxygen atoms

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Applied Physics · 2010 · 59 citations

Natural Sciences, Materials Science, Physics +17

Oxygen (³P) atom recombination on a Pyrex surface in an O₂ plasma

Jean‐Paul Booth, Olivier Guaitella, Abhyuday Chatterjee et al. · Plasma Sources Science and Technology · 2019 · 57 citations

Natural Sciences, Physics, Plasma Physics +12

Experimental and theoretical study of dynamic effects in low-frequency capacitively coupled discharges

O.V. Braginsky, A. S. Kovalev, D. V. Lopaev et al. · Journal of Physics D Applied Physics · 2011 · 55 citations

Natural Sciences, Electrical Engineering, Physics +16

Low-<i>k</i>films modification under EUV and VUV radiation

A. T. Rakhimov, Yu. A. Mankelevich, D. V. Lopaev et al. · Journal of Physics D Applied Physics · 2013 · 52 citations

Engineering, Materials Engineering, Materials Science +16