Teuvo Sillanpää

A bulk micromachined silicon angular rate sensor

Heikki Kuisma, Tapani Ryhänen, Juha Lahdenperä et al. · 2002 · 21 citations

Engineering, Soft Robotics, Micromachines +15

Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Mika Suhonen, Jussi Graeffe, Teuvo Sillanpää et al. · Smart Materials and Structures · 2001 · 18 citations

Optical Materials, Engineering, Optic Design +24

Design and Fabrication of Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers for Air Flow Measurements

Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian, Jaakko Saarilahti et al. · 2019 · 17 citations

Electrical Engineering, Engineering, Microfabrication +15

Energy Autonomous Wireless Valve Leakage Monitoring System With Acoustic Emission Sensor

Colm Mc Caffrey, Teuvo Sillanpää, Henrik Huovila et al. · IEEE Transactions on Circuits and Systems I Regular Papers · 2017 · 16 citations

Sensor Networks, Acoustic Emission Sensor, Electrical Engineering +15

Ultra-High Sensitivity Surface-Micromachined Capacitive Differential Pressure Sensor for Low-Pressure Applications

Tapio Pernu, Jaakko Saarilahti, Jukka Kyynäräinen et al. · Journal of Microelectromechanical Systems · 2022 · 16 citations

Chip Size, Biomedical Sensors, Engineering +14