Scanning micromechanical mirror for fine-pointing units of intersatellite optical links

Abstract

A light and fast two-axial fine-pointing mirror has a number of space applications, especially in intersatellite optical links. The fine pointing of laser beams in optical links is currently realized with electromagnetic or piezoelectric actuators, which are relatively large and heavy. Micro-electro-mechanical system technology bears a high potential in space applications, offering a reduction in device size, mass and power consumption. Microtechnology facilitates batch mode fabrication, yielding a low cost per unit. VTT Automation has designed and partially tested a silicon micromachined electrostatically actuated two-axial mirror, which can be controlled with microradian resolution and large bandwidth over the angular range of ±3 mrad.