Hannu Sipola

Capacitive microphone with low-stress polysilicon membrane and high-stress polysilicon backplate

Altti Torkkeli, Outi Rusanen, Jaakko Saarilahti et al. · Sensors and Actuators A Physical · 2000 · 97 citations

Micromachined Ultrasonic Transducer, Flexible Electronics, Low-stress Polysilicon Membrane

An Ultra-Low Noise Superconducting Antenna-Coupled Microbolometer With a Room-Temperature Read-Out

Arttu Luukanen, Erich N. Grossman, Aaron Miller et al. · IEEE Microwave and Wireless Components Letters · 2006 · 42 citations

Engineering, Oscillators, Measurement +22

Low-noise readout of superconducting bolometers based on electrothermal feedback

Jari Penttilä, Hannu Sipola, P. Helistö et al. · Superconductor Science and Technology · 2006 · 29 citations

Bolometer Phonon, Superconducting Material, Electrical Engineering +15

Optical and Electrical Characterization of a Large Kinetic Inductance Bolometer Focal Plane Array

Andrey Timofeev, Juho Luomahaara, Leif Grönberg et al. · IEEE Transactions on Terahertz Science and Technology · 2017 · 25 citations

Optical Engineering, Thz Photonics, Optical Materials +24

Antenna-coupled microbolometers for passive THz direct detection imaging arrays

P. Helistö, Arttu Luukanen, Leif Grönberg et al. · 2006 · 24 citations

Thz Photonics, Antenna-coupled Microbolometers, Engineering +11