Nuriel Amir

Quality metric for accurate overlay control in <20nm nodes

Dana Klein, Eran Amit, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Engineering, Quality Management, Metrology +9

Overlay accuracy calibration

Eran Amit, Dana Klein, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

Engineering, Systems Engineering, Metrology +15

Scatterometry or imaging overlay: a comparative study

Simon C. C. Hsu, Yuan Chi Pai, Charlie Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

Natural Sciences, Biomedical Engineering, Biomedical Imaging +12

Multi layer overlay measurement recent developments

Nuriel Amir, Nimrod Shuall, Inna Tarshish-Shapir et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 12 citations

Engineering, Materials Engineering, Materials Science +13

Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text

Engineering, Manufacturing Engineering, Systems Engineering +17