Concepedia
Statistics
Publications
2
Citations
23
H-Index
Active since
2014
Affiliations
KLA (Israel)(Current)
United Microelectronics (Taiwan)
Yuan Chi Pai is an author at KLA (Israel) specializing in layer coverage, manufacturing metrology, and scatterometry.
Publications per year
2014–2015
Scatterometry or imaging overlay: a comparative study
Simon C. C. Hsu, Yuan Chi Pai, Charlie Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations
Natural Sciences, Biomedical Engineering, Biomedical Imaging +12
Techniques for improving overlay accuracy by using device correlated metrology targets as reference
Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text
Engineering, Manufacturing Engineering, Systems Engineering +17
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