Concepedia

Eran Amit

EA

Statistics

Publications

5

Citations

75

H-Index

5

Active since

2012

Affiliations

KLA (Israel)(Current)

KLA (United States)

Eran Amit is an author at KLA (Israel) specializing in overlay metrology, metrology, and quality engineering.

Publications per year

2012–2014

5

Publications

5

Overlay accuracy fundamentals

Daniel Kandel, Vladimir Levinski, Noam Sapiens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations

Engineering, Manufacturing Engineering, Material Visualization +16

Quality metric for accurate overlay control in <20nm nodes

Dana Klein, Eran Amit, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Engineering, Quality Management, Metrology +9

Overlay quality metric

G. M. Cohen, Eran Amit, Dana Klein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 14 citations

Management, Quality Management, Systems Engineering +15

Overlay accuracy calibration

Eran Amit, Dana Klein, G. M. Cohen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 14 citations

Engineering, Systems Engineering, Metrology +15

Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text

Engineering, Manufacturing Engineering, Systems Engineering +17

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