Concepedia

Vladimir Levinski

VL

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Publications

3

Citations

53

H-Index

3

Active since

2007

Affiliations

KLA (Israel)(Current)

Vladimir Levinski is an author at KLA (Israel) specializing in engineering, calibration, and computer engineering.

Top concepts

Publications per year

2007–2012

3

Publications

3

Overlay accuracy fundamentals

Daniel Kandel, Vladimir Levinski, Noam Sapiens et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations

Differential signal scatterometry overlay metrology: an accuracy investigation

Daniel Kandel, Mike Adel, Berta Dinu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

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Overlay quality metric

G. M. Cohen, Eran Amit, Dana Klein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 14 citations

, , +18

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