Vidya Vaenkatesan

Overlay and edge placement control strategies for the 7nm node using EUV and ArF lithography

Jan Mulkens, M. M. Hanna, Hannah Wei et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 68 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Adhesion and friction behaviours of polydimethylsiloxane – A fresh perspective on JKR measurements

Vidya Vaenkatesan, Zhili Li, Willem‐Pier Vellinga et al. · Polymer · 2006 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +16

Improving the Brightness and Daylight Contrast of Organic Light‐Emitting Diodes

Vidya Vaenkatesan, R. T. Wegh, Jean‐Pierre Teunissen et al. · Advanced Functional Materials · 2005 · 27 citations

Engineering, Materials Engineering, Materials Science +11

YieldStar: a new metrology platform for advanced lithography control

Jos G. Maas, Martin Ebert, Kaustuve Bhattacharyya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 25 citations

Engineering, Manufacturing Engineering, Instrumentation +13

Impact of an etched EUV mask black border on imaging and overlay

Natalia Davydova, Robert de Kruif, Norihito Fukugami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

Engineering, Optometry, Digital Imaging +15