Concepedia

Andreia Figueiredo dos Santos

AF

2

Publications

33

Citations

2

H-Index

2014

Active since

Affiliations

Micron (United States)(Current)

Andreia Figueiredo dos Santos is an author at Micron (United States) specializing in engineering, microfabrication, and microelectronics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationElectronic Packaging3D PrintingNanoelectronicsDefect Tolerance

Publications per year

2014–2021

2

Publications

2

Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Electron-beam Lithography, Fluorine Units +21

Pattern collapse mitigation by controlling atmosphere during development process for semiconductor lithography

Masahiko Harumoto, Tomohiro Motono, Andreia Figueiredo dos Santos et al. · Japanese Journal of Applied Physics · 2021 · 14 citations

Engineering, Electron-beam Lithography, Semiconductor Lithography +16

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