Concepedia

Masahiko Harumoto

MH

3

Publications

39

Citations

3

H-Index

2010

Active since

Affiliations

SCREEN (Japan)(Current)

The University of Osaka

Masahiko Harumoto is an author at SCREEN (Japan) specializing in engineering, electronic packaging, and microelectronics.

Top concepts

EngineeringMaterial ScienceMicroelectronicsElectronic Packaging3D PrintingApplied PhysicsSurface ScienceDefect ToleranceMicrofabricationElectrical Insulation

Publications per year

2010–2022

3

Publications

3

Pattern collapse mitigation by controlling atmosphere during development process for semiconductor lithography

Masahiko Harumoto, Tomohiro Motono, Andreia Figueiredo dos Santos et al. · Japanese Journal of Applied Physics · 2021 · 14 citations

Engineering, Electron-beam Lithography, Semiconductor Lithography +16

Dependence of photoresist dissolution dynamics in alkaline developers on alkyl chain length of tetraalkylammonium hydroxide

Masahiko Harumoto, Julius Joseph Santillan, Toshiro Itani et al. · Japanese Journal of Applied Physics · 2022 · 13 citations

Study of post-develop defect on typical EUV resist

Masahiko Harumoto, Kazuhito Shigemori, Akihiro Hisai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations

Materials Engineering, Materials Science, Electrical Engineering +11

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