2
Publications
32
Citations
2
H-Index
2002
Active since
Affiliations
RC Electronics (United States)(Current)
Akihiro Hisai is an author at RC Electronics (United States) specializing in electronic packaging, electrical engineering, and microelectronics.
Top concepts
EngineeringMicroelectronicsElectronic PackagingElectrical EngineeringHeat TransferThermodynamicsApplied PhysicsDefect ToleranceMaterial ScienceThermal Modeling
Publications per year
2002–2010
2
2
Optimizing CD uniformity by total PEB cycle temperature control on track equipment
Akihiro Hisai, Koji Kaneyama, Charles Pieczulewski · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 20 citations
Electrical Engineering, Wafer Scale Processing, Engineering +15
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