Concepedia

Ayako Kawanishi

AK

Statistics

Publications

7

Citations

188

H-Index

7

Active since

2002

Affiliations

Toshiba (Japan)(Current)

Tokyo Electron (Japan)

Ayako Kawanishi is an author at Toshiba (Japan) specializing in semiconductor devices, natural sciences, and materials science.

Publications per year

2002–2013

7

Publications

7

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Ground State Proton Transfer in Phenol–(NH<sub>3</sub>)<sub><i>n</i></sub> (<i>n</i> ≤ 11) Clusters Studied by Mid-IR Spectroscopy in 3–10 μm Range

Mitsuhiko Miyazaki, Ayako Kawanishi, Iben B. Nielsen et al. · The Journal of Physical Chemistry A · 2013 · 34 citations

Natural Sciences, Chemistry, Physics +16

Purification of a Serine Protease of <i>Vibrio parahaemolyticus</i> and Its Characterization

Masami Ishihara, Ayako Kawanishi, Hirofumi Watanabe et al. · Microbiology and Immunology · 2002 · 25 citations

Life Sciences, Biochemistry, Microbiology +17

Sub-30nm via interconnects fabricated using directed self-assembly

Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu et al. · Microelectronic Engineering · 2013 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +10

Contact hole shrink process using directed self-assembly

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +16

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