Manfred Maul

Triangulation With Expanded Range Of Depth

G. Bickel, Gerd Häusler, Manfred Maul · Optical Engineering · 1985 · 121 citations

Engineering, Mechatronics Engineering, 3D Modeling +13

Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process

Kafai Lai, Alan E. Rosenbluth, Saeed Bagheri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 47 citations

Engineering, Computer Engineering, Electrical Engineering +13

Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners

Jörg Zimmermann, Paul Gräupner, Jens Timo Neumann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 26 citations

Engineering, Electrical Engineering, Digital Imaging +12

Range sensing based on shearing interferometry

Gerd Häusler, J. Hutfless, Manfred Maul et al. · Applied Optics · 1988 · 23 citations

Engineering, Vision Science, Machine Vision +15

Optimizing and enhancing optical systems to meet the low k 1 challenge

Donis G. Flagello, Robert Socha, Xuelong Shi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations

Engineering, Physics, Biomedical Optics +15