Statistics
Publications
3
Citations
196
H-Index
3
Active since
2000
Affiliations
Schott (Germany)(Current)
Lilian Atabo is an author at Schott (Germany) specializing in engineering, etching processes, and microfabrication.
Publications per year
2000–2006
3
3
<title>Etching 200-mm diameter SCALPEL masks with the ASE process</title>
Ian Ronald Johnston, Huma Ashraf, Jy Bhardwaj et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 10 citations
Engineering, Manufacturing Engineering, Materials Engineering +15
1–3 of 3