Concepedia

Serrita A. McAuley

SA

2

Publications

173

Citations

2

H-Index

2000

Active since

Serrita A. McAuley is an author specializing in microfabrication, engineering, and 3d printing.

Top concepts

EngineeringMicrofabrication3D PrintingMicrofluidicsApplied PhysicsInstrumentationSurface ScienceMaterial ScienceMicroelectronicsIntegrated Circuits

Publications per year

2000–2001

2

Publications

2

Silicon micromachining using a high-density plasma source

Serrita A. McAuley, Hamza Ashraf, Lilian Atabo et al. · Journal of Physics D Applied Physics · 2001 · 163 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

<title>Etching 200-mm diameter SCALPEL masks with the ASE process</title>

Ian Ronald Johnston, Huma Ashraf, Jy Bhardwaj et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 10 citations

Materials Science, Engineering, Ase Process +14

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