Serrita A. McAuley - Concepedia

Author

Serrita A. McAuley

Also Known As

S A McAuley, S. MCAULEY, S. Mcauley, Serrita A. McAuley

Publications

192

Citations

H-Index

Concepts

Serrita A. McAuley is an author specializing in microfabrication, engineering, and 3d printing.

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	173
2	Applied Physics	1	1	10
3	Electrical Engineering	1	1	163
4	Materials Science	1	1	10
5	Mechanical Engineering	1	1	163

Serrita A. McAuley

Publications

173

Citations

H-Index

Page 1

	Year	Citations
Silicon micromachining using a high-density plasma source Serrita A. McAuley, Hamza Ashraf, Lilian Atabo, Journal of Physics D Applied Physics Electrical EngineeringWafer Scale ProcessingEngineeringMicromachinesHigh-density Plasma Source	2001	163
<title>Etching 200-mm diameter SCALPEL masks with the ASE process</title> Ian Ronald Johnston, Huma Ashraf, Jy Bhardwaj, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceEngineeringAse ProcessAdvanced Silicon EtchMicrofabrication	2000	10

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