M. Mäenpää

Phase transformations in laser-irradiated Au-Si thin films

M. von Allmen, S. S. Lau, M. Mäenpää et al. · Applied Physics Letters · 1980 · 82 citations

Optical Materials, Engineering, Rapid Resolidification +20

Thermal Stability of Hafnium and Titanium Nitride Diffusion Barriers in Multilayer Contacts to Silicon

I. Suni, M. Mäenpää, M.‐A. Nicolet et al. · Journal of The Electrochemical Society · 1983 · 81 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +18

Investigation of titanium—nitride layers for solar-cell contacts

H. von Seefeld, N.W. Cheung, M. Mäenpää et al. · IEEE Transactions on Electron Devices · 1980 · 78 citations

Electrical characteristics of thin Ni2Si, NiSi, and NiSi2 layers grown on silicon

E. G. Colgan, M. Mäenpää, M. Finetti et al. · Journal of Electronic Materials · 1983 · 65 citations

Materials Science, Electrical Characteristics, Electrical Engineering +8

Epitaxial growth of Ge on 〈100〉 Si by a simple chemical vapor deposition technique

T. F. Kuech, M. Mäenpää, S.S. Lau · Applied Physics Letters · 1981 · 59 citations

Materials Engineering, Materials Science, Electrical Engineering +15