Investigation of titanium—nitride layers for solar-cell contacts

Abstract

Reactively sputtered titanium-nitride layers have been incorporated as diffusion barriers in a titanium-silver metallization scheme on silicon, Backscattering analysis (2-MeV He <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">+</sup> , RBS) indicates that the integrity of the system is basically preserved during annealing at 600° for 10 min. Electrical properties were determined for titanium-nitride layers prepared under different deposition conditions. Resistivity and Hall mobility appear to depend on the oxygen contamination of the deposited material. For the lowest oxygen concentration (<5 at %) a resistivity of 170 µΩ . cm has been found.