Statistics
Publications
9
Citations
237
H-Index
9
Active since
1988
Affiliations
Hitachi (Japan)(Current)
K. Arai is an author at Hitachi (Japan) specializing in engineering, electrical engineering, and semiconductor devices.
Publications per year
1988–2013
9
9
Fundamentals of overlay measurement and inspection using scanning electron-microscope
Takeshi Kato, Yutaka Okagawa, Osamu Inoue et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations
Engineering, Manufacturing Engineering, Quality Management +15
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