A multigigabit DRAM technology with 6F/sup 2/ open-bitline cell, distributed overdriven sensing, and stacked-flash fuse

Abstract

A multigigabit DRAM technology was developed that features a low-noise 6F/sup 2/ open-bitline cell with fully utilized edge arrays, distributed overdriven sensing for operation below 1 V, and a highly reliable post-packaging repair scheme using a stacked-flash fuse. This technology, which can be used to fabricate a 0,13-/spl mu/m 180-mm/sup 2/ 1-Gb DRAM assembled in a 400-mil package, was verified using a 57.6-mm/sup 2/, 200-MHz array-cycle, 256-Mb test chip with 0.109-/spl mu/m/sup 2/ cells.