Concepedia

Rudolf R. Burke

RR

Statistics

Publications

8

Citations

183

H-Index

8

Active since

1970

Affiliations

Centre National de la Recherche Scientifique(Current)

Université Joseph Fourier

Rudolf R. Burke is an author at Centre National de la Recherche Scientifique specializing in physics, natural sciences, and plasma physics.

Publications per year

1970–1998

8

Publications

8

Influence of ion energy on the physical properties of plasma deposited SiO2 reset films

O. Joubert, Rudolf R. Burke, L. Vallier et al. · Applied Physics Letters · 1993 · 35 citations

, , +17

Hydrogen atom participation in<i>D</i>region ion chemistry

Rudolf R. Burke · Journal of Geophysical Research Atmospheres · 1970 · 31 citations

, , +7

Distributed electron cyclotron resonance in silicon processing: Epitaxy and etching

Rudolf R. Burke, Jean Pelletier, C. Pomot et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 30 citations

, , +17

Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)

T. Lagarde, Jacques Pelletier, Y. Arnal et al. · Review of Scientific Instruments · 1998 · 20 citations

, , +17

Ion implantation based on the uniform distributed plasma

Y. Arnal, Rudolf R. Burke, O. Lesaint et al. · Surface and Coatings Technology · 1997 · 19 citations

, , +5

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