Concepedia

C. Pomot

CP

12

Publications

366

Citations

11

H-Index

1975

Active since

Affiliations

Centre National de la Recherche Scientifique(Current)

Laboratoire de Physique des Plasmas

C. Pomot is an author at Centre National de la Recherche Scientifique specializing in engineering, physics, and applied physics.

Top concepts

EngineeringPhysicsApplied PhysicsMaterial ScienceSurface ScienceElectrical EngineeringMicroelectronicsMicrofabricationPlasma ConfinementPlasma Physics

Publications per year

1975–1990

12

Publications

12

Application of wide-gap semiconductors to surface ionization: Work functions of AlN and SiC single crystals

J.M. Pelletier, Dr Roxane Gervais, C. Pomot · Journal of Applied Physics · 1984 · 79 citations

Aluminium Nitride, Engineering, Work Function +16

Work function of sintered lanthanum hexaboride

J.M. Pelletier, C. Pomot · Applied Physics Letters · 1979 · 56 citations

Materials Science, Materials Engineering, Richardson Constant +10

Plasma etching in magnetic multipole microwave discharge

Y. Arnal, Jacques Pelletier, C. Pomot et al. · Applied Physics Letters · 1984 · 39 citations

Electrical Engineering, Plasma Electronics, Engineering +12

Anisotropic etching of silicon using an SF6/Ar microwave multipolar plasma

C. Pomot, B. Mahi, Barbara Petit et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 35 citations

Materials Science, Electrical Engineering, Sf6 Partial Pressure +14

Distributed electron cyclotron resonance in silicon processing: Epitaxy and etching

Rudolf R. Burke, Jean Pelletier, C. Pomot et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 30 citations

Engineering, Electron-beam Lithography, Plasma Physics +16

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