Statistics
Publications
2
Citations
65
H-Index
2
Active since
1986
Affiliations
B. Mahi is an author at Centre National de la Recherche Scientifique specializing in plasma etching, silicon etching, and physics.
Publications per year
1986–1987
2
2
B. Mahi, Y. Arnal, C. Pomot · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 30 citations
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