Concepedia

H. Voelker

HV

Statistics

Publications

4

Citations

61

H-Index

4

Active since

1988

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

H. Voelker is an author at IBM Research - Thomas J. Watson Research Center specializing in applied physics, engineering, and radiology.

Top concepts

EngineeringApplied PhysicsHealthRadiologyX-ray ImagingMaterial ScienceMicroelectronicsMicrofabricationIntegrated CircuitsElectrical Engineering

Publications per year

1988–1989

4

Publications

4

Thermal effects in x-ray masks during synchrotron storage ring irradiation

Yuli Vladimirsky, José R. Maldonado, R. Fair et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 24 citations

Experimental Results, Engineering, Health Sciences +15

Fully scaled 0.5 μm metal–oxide semiconductor circuits by synchrotron x-ray lithography: Mask fabrication and characterization

R. Viswanathan, R. E. Acosta, David E. Seeger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 15 citations

Engineering, Electron-beam Lithography, X-ray Masks +21

Control of fixturing-induced distortion in x-ray masks

A.D. Wilson, Cameron Lapadula, J. P. Silverman et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 12 citations

Electron-beam Lithography, Health Sciences, Medical Imaging +11

Application of synchrotron x-ray lithography to fabricate fully scaled 0.5 μm complementary metal–oxide semiconductor devices and circuits

L. K. Wang, J. P. Silverman, David E. Seeger et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 10 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +16

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