Vivian Ryan

CVD Co and its application to Cu damascene interconnections

T. Nogami, J. Maniscalco, Anita Madan et al. · 2010 · 43 citations

Materials Science, Materials Engineering, Cvd Co +15

The effects of vacuum ultraviolet radiation on low-<i>k</i> dielectric films

H. Sinha, M. T. Nichols, J. L. Lauer et al. · Journal of Applied Physics · 2012 · 42 citations

Ultraviolet Light, Engineering, Glow Discharge +19

CPI challenges to BEOL at 28nm node and beyond

Vivian Ryan, D. Breuer, H. Geisler et al. · 2012 · 19 citations

Engineering, Advanced Computing, Beol Features +17

Co Liner Impact on Microstructure of Cu Interconnects

Xunyuan Zhang, Linjun Cao, Vivian Ryan et al. · ECS Journal of Solid State Science and Technology · 2014 · 16 citations

Engineering, Integrated Circuits, Interconnect (Integrated Circuits) +16

Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation

Hua Zheng, Sean W. King, Vivian Ryan et al. · Applied Physics Letters · 2014 · 16 citations

Engineering, Nanoporous Material, Glow Discharge +17