Concepedia

Chemical-mechanical polishing improvements and subsurface damage elimination for Cz grown (010) β-Ga2O3 substrates

Robert M. Lavelle, W.J. Everson, Daniel Erdely, Luke A. M. Lyle, Scott W. Pistner, Samuel R. Hallacher, Joan M. Redwing, David W. Snyder

Materials Science in Semiconductor Processing · 2025 · 10 citations · 4 references

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References

4

Fabrication and characterization of transparent conductive Sn‐doped β‐Ga<sub>2</sub>O<sub>3</sub> single crystal

Norihito Suzuki, Shigeo Ohira, M. Tanaka et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2007 · 264 citations

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Development of Large Diameter Semi-Insulating Gallium Oxide (Ga<sub>2</sub>O<sub>3</sub>) Substrates

J. D. Blevins, K. T. Stevens, Adam C. Lindsey et al. · IEEE Transactions on Semiconductor Manufacturing · 2019 · 109 citations

, , +15

Optimization of chemical mechanical polishing of (010) β-Ga2O3

Michael E. Liao, Kenny Huynh, Lezli Matto et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2023 · 28 citations

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The Effect of 4H-SiC Substrate Surface Scratches on Chemical Vapor Deposition Grown Homo-Epitaxial Layer Quality

Ning Zhang, Yi Chen, Edward Sanchez et al. · Materials science forum · 2009 · 16 citations · Full text

, , +17