Fabrication and characterization of transparent conductive Sn‐doped β‐Ga₂O₃ single crystal

Abstract

Abstract Transparent conductive Sn‐doped β‐Ga 2 O 3 single crystal with high crystallinity was successfully fabricated as a substrate for the growth of GaN‐based compounds. Sn‐doped β‐Ga 2 O 3 single crystals were grown using a floating zone (FZ) method, and the properties of electrical conductivity, optical transmittance, and crystallinity were characterized to optimize the growth condition. It was found that these properties are controlled by the Sn doping concentration, and the specimen for 32 ppm Sn‐doped β‐Ga 2 O 3 single crystal was optimized to satisfy these properties simultaneously, i.e. the substrate with the internal optical transmittance of above ∼85% in the visible region, the electrical resistivity of 4.27×10 –2 Ωcm, the carrier density of 2.26×10 18 cm –3 , and the FWHM of X‐ray rocking curve of 43 arcsec was obtained. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)